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앵커 1

Ferrofluid for Gas & Dust Sealing

Ferrofluid Feedthrough.jpg


  • Magnetic fluid products used for sealing.

  • This contactless seal sealing that creating O-ring by ferrofluid and magnets.

  • ​Improves durability of the installation without friction and prevents harmful gas and dust during extreme vacuum.

Application Area

Ion Implant Systems , CVD, Organic EL, Sputter, Ion implanters, X-ray generators, Wafer transfer robot, LCD conveying agitator, Plasma Etching Systems, Optical accelerator, HID Lamp, Automobile HID Lamp Manufacturing Process, CD RW

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